A correlative method to quantitatively image trace concentrations of elements by combined SIMS-EDX analysis
نویسندگان
چکیده
The study demonstrates a new method to quantify Secondary Ion Mass Spectrometry (SIMS) images by using synergetic combination of Energy Dispersive X-ray spectroscopy (EDX) and SIMS.
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ژورنال
عنوان ژورنال: Journal of Analytical Atomic Spectrometry
سال: 2021
ISSN: ['1364-5544', '0267-9477']
DOI: https://doi.org/10.1039/d0ja00289e